5/8/2011	1:43:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2011	1:43:59 PM	Recipe started at 1:43 PM
5/8/2011	1:43:59 PM	H2 valve closed
5/8/2011	1:43:59 PM	BCl3 valve closed
5/8/2011	1:43:59 PM	PH3 valve closed
5/8/2011	1:43:59 PM	SiCl4 pre valve closed
5/8/2011	1:43:59 PM	SiCl4 post valve closed
5/8/2011	1:43:59 PM	Main Vac valve closed
5/8/2011	1:43:59 PM	Bypass valve closed
5/8/2011	1:43:59 PM	Bubbler valve closed
5/8/2011	1:43:59 PM	Helium valve opened
5/8/2011	1:43:59 PM	Helium MFC set to  500.000000
5/8/2011	1:43:59 PM	H2 MFC set to  0.000000
5/8/2011	1:43:59 PM	BCl3 MFC set to  0.000000
5/8/2011	1:43:59 PM	PHl3 MFC set to  0.000000
5/8/2011	1:43:59 PM	SiCl4 MFC set to  0.000000
5/8/2011	1:43:59 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	1:44:00 PM	Tube furnace set to 0
5/8/2011	1:45:18 PM	Helium valve closed
5/8/2011	1:45:18 PM	H2 valve closed
5/8/2011	1:45:18 PM	BCl3 valve closed
5/8/2011	1:45:18 PM	PH3 valve closed
5/8/2011	1:45:18 PM	SiCl4 pre valve closed
5/8/2011	1:45:18 PM	SiCl4 post valve closed
5/8/2011	1:45:18 PM	Main Vac valve closed
5/8/2011	1:45:18 PM	Bypass valve closed
5/8/2011	1:45:18 PM	Bubbler valve closed
5/8/2011	1:45:18 PM	Helium MFC set to  0.000000
5/8/2011	1:45:18 PM	H2 MFC set to  0.000000
5/8/2011	1:45:18 PM	BCl3 MFC set to  0.000000
5/8/2011	1:45:18 PM	PHl3 MFC set to  0.000000
5/8/2011	1:45:18 PM	SiCl4 MFC set to  0.000000
5/8/2011	1:45:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	1:45:19 PM	Tube furnace set to 0
5/8/2011	1:45:19 PM	Run finished at 1:45 PM
5/8/2011	1:45:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2011	1:47:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2011	1:47:49 PM	Recipe started at 1:47 PM
5/8/2011	1:47:49 PM	Helium valve closed
5/8/2011	1:47:49 PM	H2 valve closed
5/8/2011	1:47:49 PM	BCl3 valve closed
5/8/2011	1:47:49 PM	PH3 valve closed
5/8/2011	1:47:49 PM	SiCl4 pre valve closed
5/8/2011	1:47:49 PM	SiCl4 post valve closed
5/8/2011	1:47:49 PM	Main Vac valve closed
5/8/2011	1:47:49 PM	Bubbler valve closed
5/8/2011	1:47:49 PM	Bypass valve opened
5/8/2011	1:47:49 PM	Helium MFC set to  0.000000
5/8/2011	1:47:49 PM	H2 MFC set to  0.000000
5/8/2011	1:47:49 PM	BCl3 MFC set to  0.000000
5/8/2011	1:47:49 PM	PHl3 MFC set to  0.000000
5/8/2011	1:47:49 PM	SiCl4 MFC set to  0.000000
5/8/2011	1:47:49 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	1:47:50 PM	Tube furnace set to 0
5/8/2011	1:48:21 PM	Helium valve closed
5/8/2011	1:48:21 PM	H2 valve closed
5/8/2011	1:48:21 PM	BCl3 valve closed
5/8/2011	1:48:21 PM	PH3 valve closed
5/8/2011	1:48:21 PM	SiCl4 pre valve closed
5/8/2011	1:48:21 PM	SiCl4 post valve closed
5/8/2011	1:48:21 PM	Bubbler valve closed
5/8/2011	1:48:21 PM	Main Vac valve opened
5/8/2011	1:48:21 PM	Bypass valve opened
5/8/2011	1:48:21 PM	Helium MFC set to  0.000000
5/8/2011	1:48:21 PM	H2 MFC set to  0.000000
5/8/2011	1:48:21 PM	BCl3 MFC set to  0.000000
5/8/2011	1:48:21 PM	PHl3 MFC set to  0.000000
5/8/2011	1:48:21 PM	SiCl4 MFC set to  0.000000
5/8/2011	1:48:21 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	1:48:21 PM	Tube furnace set to 0
5/8/2011	1:48:22 PM	Run finished at 1:48 PM
5/8/2011	1:48:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2011	1:48:34 PM	Helium valve opened
5/8/2011	1:48:38 PM	Helium MFC set to  10.000000
5/8/2011	1:59:11 PM	Helium valve closed
5/8/2011	1:59:13 PM	Helium MFC set to  0.000000
5/8/2011	1:59:22 PM	Bypass valve closed
5/8/2011	1:59:23 PM	Main Vac valve closed
5/8/2011	8:57:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2011	8:58:00 PM	Recipe started at 8:58 PM
5/8/2011	8:58:00 PM	H2 valve closed
5/8/2011	8:58:00 PM	BCl3 valve closed
5/8/2011	8:58:00 PM	PH3 valve closed
5/8/2011	8:58:00 PM	SiCl4 pre valve closed
5/8/2011	8:58:00 PM	SiCl4 post valve closed
5/8/2011	8:58:00 PM	Main Vac valve closed
5/8/2011	8:58:00 PM	Bypass valve closed
5/8/2011	8:58:00 PM	Bubbler valve closed
5/8/2011	8:58:00 PM	Helium valve opened
5/8/2011	8:58:00 PM	Helium MFC set to  500.000000
5/8/2011	8:58:00 PM	H2 MFC set to  0.000000
5/8/2011	8:58:00 PM	BCl3 MFC set to  0.000000
5/8/2011	8:58:00 PM	PHl3 MFC set to  0.000000
5/8/2011	8:58:00 PM	SiCl4 MFC set to  0.000000
5/8/2011	8:58:00 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	8:58:00 PM	Tube furnace set to 0
5/8/2011	8:59:20 PM	Helium valve closed
5/8/2011	8:59:20 PM	H2 valve closed
5/8/2011	8:59:20 PM	BCl3 valve closed
5/8/2011	8:59:20 PM	PH3 valve closed
5/8/2011	8:59:20 PM	SiCl4 pre valve closed
5/8/2011	8:59:20 PM	SiCl4 post valve closed
5/8/2011	8:59:20 PM	Main Vac valve closed
5/8/2011	8:59:20 PM	Bypass valve closed
5/8/2011	8:59:20 PM	Bubbler valve closed
5/8/2011	8:59:20 PM	Helium MFC set to  0.000000
5/8/2011	8:59:20 PM	H2 MFC set to  0.000000
5/8/2011	8:59:20 PM	BCl3 MFC set to  0.000000
5/8/2011	8:59:20 PM	PHl3 MFC set to  0.000000
5/8/2011	8:59:20 PM	SiCl4 MFC set to  0.000000
5/8/2011	8:59:20 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	8:59:20 PM	Tube furnace set to 0
5/8/2011	8:59:20 PM	Run finished at 8:59 PM
5/8/2011	8:59:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2011	9:01:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2011	9:01:33 PM	Recipe started at 9:01 PM
5/8/2011	9:01:33 PM	Helium valve closed
5/8/2011	9:01:33 PM	H2 valve closed
5/8/2011	9:01:33 PM	BCl3 valve closed
5/8/2011	9:01:33 PM	PH3 valve closed
5/8/2011	9:01:33 PM	SiCl4 pre valve closed
5/8/2011	9:01:33 PM	SiCl4 post valve closed
5/8/2011	9:01:33 PM	Main Vac valve closed
5/8/2011	9:01:33 PM	Bubbler valve closed
5/8/2011	9:01:33 PM	Bypass valve opened
5/8/2011	9:01:33 PM	Helium MFC set to  0.000000
5/8/2011	9:01:33 PM	H2 MFC set to  0.000000
5/8/2011	9:01:33 PM	BCl3 MFC set to  0.000000
5/8/2011	9:01:33 PM	PHl3 MFC set to  0.000000
5/8/2011	9:01:33 PM	SiCl4 MFC set to  0.000000
5/8/2011	9:01:33 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	9:01:33 PM	Tube furnace set to 0
5/8/2011	9:02:05 PM	Helium valve closed
5/8/2011	9:02:05 PM	H2 valve closed
5/8/2011	9:02:05 PM	BCl3 valve closed
5/8/2011	9:02:05 PM	PH3 valve closed
5/8/2011	9:02:05 PM	SiCl4 pre valve closed
5/8/2011	9:02:05 PM	SiCl4 post valve closed
5/8/2011	9:02:05 PM	Bubbler valve closed
5/8/2011	9:02:05 PM	Main Vac valve opened
5/8/2011	9:02:05 PM	Bypass valve opened
5/8/2011	9:02:05 PM	Helium MFC set to  0.000000
5/8/2011	9:02:05 PM	H2 MFC set to  0.000000
5/8/2011	9:02:05 PM	BCl3 MFC set to  0.000000
5/8/2011	9:02:05 PM	PHl3 MFC set to  0.000000
5/8/2011	9:02:05 PM	SiCl4 MFC set to  0.000000
5/8/2011	9:02:05 PM	Bypass solenoid MFC set to  0.000000
5/8/2011	9:02:05 PM	Tube furnace set to 0
5/8/2011	9:02:05 PM	Run finished at 9:02 PM
5/8/2011	9:02:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2011	9:03:36 PM	Bypass valve closed
5/8/2011	9:03:37 PM	Main Vac valve closed
